Patent for Carbon nanotubes that are highly conductive that has bundle moieties, with low bulk density and its manufacturing method

Semiconductor Energy Laboratory Co., Ltd. (Atsugi-shi, Kanagawa-ken, JP) This is a silicon structure which has a complex 3D shape. A simple and straightforward method of making the silicon structure is offered with the help of a phenomenon in which an ordered pattern is formed in a natural way to form an amorphous nano-structure. Plasma treatment …

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